Thermal treatment effect on the optical properties of ZrO 2 thin films deposited by thermionic vacuum arc

KORKMAZ Ş., PAT S., Ekem N., Zafer Balbaǧ M., TEMEL S.

Vacuum, cilt.86, sa.12, ss.1930-1933, 2012 (SCI-Expanded) identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 86 Sayı: 12
  • Basım Tarihi: 2012
  • Doi Numarası: 10.1016/j.vacuum.2012.05.002
  • Dergi Adı: Vacuum
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Sayfa Sayıları: ss.1930-1933
  • Anahtar Kelimeler: Optical properties, Plasma, TVA, ZrO 2 thin films
  • Bilecik Şeyh Edebali Üniversitesi Adresli: Evet

Özet

This paper shows the ex situ thermal treatment effects of the ZrO 2 thin films obtained by TVA (thermionic vacuum arc) technique on the optical properties (e.g., transmittance, refractive index and band-gap energy) of ZrO 2 thin films. The crystal structure, surface and optical properties were investigated for ZrO 2 thin films deposited on glass substrates by thermionic vacuum arc (TVA) method. The thermal treatment effect on the optical properties of the thin films was determined. The XRD analysis showed that the deposited ZrO 2 thin films have baddeleyite (monoclinic) and zirconium (hexagonal) structures. The thicknesses and refractive index were determined by interferometric measurements. The thin films were thermal treated at different temperatures (350°C, 450°C and 550°C), and the analysis showed that the optical properties of ZrO 2 deposited thin films were improved by thermal treatment at 450°C. Crown Copyright © 2012 Published by Elsevier Ltd. All rights reserved.