Fabrication and magnetic properties of nonmagnetic ion implanted magnetic recording films for bit-patterned media

Choi C., Noh K., Oh Y., KURU C., Hong D., Chen L., ...Daha Fazla

IEEE Transactions on Magnetics, cilt.47, sa.10, ss.2532-2535, 2011 (SCI-Expanded, Scopus) identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 47 Sayı: 10
  • Basım Tarihi: 2011
  • Doi Numarası: 10.1109/tmag.2011.2158197
  • Dergi Adı: IEEE Transactions on Magnetics
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Sayfa Sayıları: ss.2532-2535
  • Anahtar Kelimeler: Ion implantation, nanolithography, perpendicular magnetic recording
  • Bilecik Şeyh Edebali Üniversitesi Adresli: Evet

Özet

We have investigated the magnetic M-H loop characteristics of CoCrPt-SiO2 perpendicular recording media as influenced by nonmagnetic ion implantations. We have also developed patterned media via ion implantation using a convenient polymer nanomask approach for local control of coercivity of magnetically hard [Co/Pd]n multilayer film with a [Co 0.3 nm Pd 0.8 nm]8/Pd 3 nm/Ta 3 nm layer structure. The CoCrPt-SiO2 magnetic layer having perpendicular magnetic anisotropy is sputter deposited on a flat substrate. The [Co/Pd]n multilayer film with vertical magnetic anisotropy is deposited and the regions corresponding to the magnetic recording bit islands are coated with polymer islands using a nanoimprinting technique. Subsequent ion implantation allows patterned penetration of implanted ions into the [Co/Pd]n multilayer film, thus creating magnetically isolated bit island geometry while maintaining the overall flat geometry of the patterned media. © 2011 IEEE.