Effect of different thickness insulator layer on dielectric properties of Al/Si3N4/p-type Si device

ORAK İ., KOÇYİĞİT A.

12th International Nanoscience and Nanotechnology Conference, 3 - 05 June 2016

  • Publication Type: Conference Paper / Summary Text
  • Bilecik Şeyh Edebali University Affiliated: No